Particle green sensor

A particle sensor and CO2 concentration sensor using MEMS technologies are developed cooperated with Seiko Instruments Inc. and OMRON Corporation as part of the research for the development of green sensor & network system technology. In the research of the particle sensor, clean level is measured by counting the scattering light of target particles. The size of the target particle is about 5 μm. Our goal is monitoring the clean level of factories of clean-level-10,000. In the research of the CO2 concentration sensor, CO2 concentration is measured by characteristics changing of ionic liquid when ionic liquid absorbs CO2. Our goal is monitoring the CO2 concentration of office or schoolroom of CO2-concentration-3000 ppm. We aim to miniaturize both sensors below 5 cm × 2 cm. We are also trying low-power-consumption driving under 0.1 mW. Connecting the proposed sensors to network, air conditioning plant can be controlled with feedback information. Thus, these MEMS green sensors are thought to lead saving of energy.